목성형 초정밀 운동 제어 플랫폼 반도체 검측량 측정 선진 포장 포지셔닝 플랫폼
Coupled with state-of-the-art AccurET controllers, the platform benefits from multiple control features such as: zero settling time, non-linear control, advanced feedforward and trajectory filters, full synchronization of all axes with nanosecond jitter, a specific gantry control algorithm, multidimensional mapping, advanced triggering capabilities based on real mapped position, advanced software diagnostic and system identification tools for control optimization.
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